4Tex bCDS chemical delivery system installed in the fab

Products — Chemical delivery

bCDS — Chemical delivery system

Controlled, safe and contamination-free supply of process chemicals — as an individually configured system for your wet-chemical processes.

bCDS chemical delivery system with containment glovebox — main view

System description

Safe chemical delivery with containment

The bCDS supplies process chemicals in a controlled and contamination-free manner. The integrated containment glovebox enables safe handling; the operator panel controls fill, circulate, purge, drain and mix functions with continuous pressure and safety monitoring.

The system is available in various configurations — from single- and multi-channel versions to a refilling station. Each system is engineered and quoted individually to your process requirements; configurations are not offered as standard variants.

Fill · Circulate · Purge · Drain · Mix Containment glovebox Emergency stop & monitoring

Advantages & applications

Engineered for wet-chemical semiconductor processes

Safe handling

Containment glovebox with viewing windows, door & bottle status and emergency stop.

Controlled supply

Monitored fill/drain pump pressure and float switch for reproducible operation.

Individually configured

Channel count, handling and layout are matched to your process and chemicals.

Which bCDS configuration fits your process?

Describe your requirements — we will engineer the system individually and prepare a quotation.

bCDS enquiry