4Tex bCDS — bulk chemistry distribution and delivery system for semiconductor liquids, installed in the fab

Products — Bulk chemistry distribution & delivery

bCDS — bulk Chemical Delivery System

4Tex's bulk chemistry distribution and delivery system for semiconductor liquids — controlled, safe and contamination-free supply of process chemicals, individually configured for your wet-chemical processes.

bCDS chemical delivery system with containment glovebox — main view

System description

Safe chemical delivery with containment

The bCDS supplies process chemicals in a controlled and contamination-free manner. The integrated containment glovebox enables safe handling; the operator panel controls fill, circulate, purge, drain and mix functions with continuous pressure and safety monitoring.

The system is available in various configurations — from single- and multi-channel versions to a refilling station. Each system is engineered and quoted individually to your process requirements; configurations are not offered as standard variants.

Fill · Circulate · Purge · Drain · Mix Containment glovebox Emergency stop & monitoring

Advantages & applications

Engineered for wet-chemical semiconductor processes

Safe handling

Containment glovebox with viewing windows, door & bottle status and emergency stop.

Controlled supply

Monitored fill/drain pump pressure and float switch for reproducible operation.

Individually configured

Channel count, handling and layout are matched to your process and chemicals.

Frequently asked questions

Questions about the bCDS

Is chemical supply interrupted during a barrel change?

Not on the Duo version: while one barrel actively supplies the process, the other can be replaced via a guided HMI sequence. The changeover uses double isolation — a manual hand valve plus an automatic upstream shut-off valve — and the connectors are mechanically keyed so they can only be engaged on the correct barrel port.

What utility connections are required for installation?

Required are a 230 VAC single-phase power supply (16 A), pressurised CDA (5–7 bar), nitrogen (N₂, 0.5–2 bar), a DI water supply and an exhaust connection. The system is designed for front-access service only — no side or rear clearance is needed, reducing the footprint required for integration.

What safety systems are built into the bCDS?

Two independent safety circuits: a Basic Safety System (EMO buttons on the power distribution box and operation panel, exhaust sensor) and a Tool Safety System (floating switch, door switches, bottle-in-place sensor). A leak sensor additionally detects any escaping liquid automatically and activates the drain pump to prevent accumulation.

What do the stack light colours indicate?

Red: fault/alarm, immediate attention required. Blue: service/maintenance required. Yellow: warning, system still operational but should be checked. Green: normal operation. Mixed colours indicate transitional or special states such as startup, standby or maintenance mode.

What warranty does 4Tex provide on the bCDS?

4Tex provides a 6-month warranty against defects in material and workmanship, calculated from the invoice date. Within this period, once a defect is reported and confirmed, 4Tex will, at its own discretion, provide a replacement or repair; shipping and installation of replacement parts are at the buyer's expense.

Which bCDS configuration fits your process?

Describe your requirements — we will engineer the system individually and prepare a quotation.

bCDS enquiry