Rapid thermal response
Precise temperature control within seconds.
Products — Point-of-use heating
Chemical Inline Heater for Semiconductor Applications
Compact hyper-dynamic chemical heater: rapid, precise and contamination-free heating of ultra-pure process fluids — engineered for wet-chemical semiconductor processes.
Product description
Contamination-free heating at the point of use
The I²R UHP inline heater heats ultra-pure process fluids directly at the point of use. The proprietary 4Tex I²R heating technology transfers heat highly efficiently and without metallic contact — at only 60 ml internal volume.
All wetted parts are made from high-purity PTFE, PFA and the proprietary I²R heating element. The system is compatible with Ultra Pure Water, acids, bases and solvents — for maximum chemical compatibility and the highest process purity in wet-chemical processes.
UL499 · CE
4 kW · 480 VAC
60 ml
up to 90 °C
Technical advantages
Six reasons for the I²R heater
Ultra-high-purity design
Metal-free wetted surfaces eliminate contamination risks.
Optimised heat-transfer geometry
Narrow-channel design for maximum heating efficiency.
Low internal volume
Only 60 ml — minimal chemical inventory, rapid process response.
Excellent chemical compatibility
Suitable for Ultra Pure Water, acids, bases and aggressive process chemicals.
Proprietary I²R technology
High-efficiency heat transfer with metal-free fluid contact.
Specifications
Technical data
| Standards | UL499, CE |
|---|---|
| Power | 4 kW (480 VAC) |
| Voltage | 480 VAC, 50/60 Hz, 3-phasig |
| External fusing | 6 A Slow Blow |
| Wetted surfaces | Proprietary I²R heating element, PTFE, PFA |
| Process outlet temp. | up to 90 °C (depending on conditions) |
| Ambient temp. | 10 °C bis 45 °C |
|---|---|
| Process flow rate | 0,5 – 10 l/min |
| Process pressure (25 / 90 °C) | max. 0,3 MPa (3 bar) |
| Purge gas | 10 – 20 l/min, max. 50 kPa, 15–25 °C |
| Cooling water | 0,5 – 3 l/min, max. 0,4 MPa, 15–25 °C |
| Weight (w/o cables) | 11,9 kg |
System integration
I²R Heater Module & Controller
The combination of the I²R heater with the required safety and control equipment forms the “I²R Heater Module” — a pre-engineered assembly for seamless integration into customer processes.
Integrated instrumentation
Process, cooling and purge flow meters plus inlet, outlet and overtemperature sensors.
PLC & HMI
Precise closed-loop temperature control, process visualisation and safety supervision.
Field reference
Proven in the field
The I²R heater is not just a datasheet product: the unit shown here is installed in a real SEZ system and running in active process operation.
Frequently asked questions
Questions about the I²R heater
What if the required point-of-use temperature can't be reached in a single pass?
For certain fluids, flow rates or target process temperatures, a single pass through the heater is not sufficient. In this case, a single-multi-pass combination approach is used: the bath temperature is first primed — elevated from room temperature to a defined priming temperature — so that the desired point-of-use temperature can then be achieved with a single pass through the heater.
What utilities does the I²R heater need besides electrical power?
In addition to the process fluid itself, the heater requires a purge-gas supply (10–20 l/min, max. 50 kPa, 15–25 °C) and a cooling-water supply (0.5–3 l/min, max. 0.4 MPa, 15–25 °C). Both connections should be planned for from the start of installation.
What certifications does the I²R heater hold?
The heater is certified to UL499 and CE and carries the TÜV Mark (type tested, production monitored) — meaning the design was not just tested once, but ongoing production is continuously monitored.
Can the I²R heater heat gases, or only liquids?
The heater is designed for liquid process fluids — Ultra Pure Water, acids, bases and solvents. The separate purge-gas connection is only used for internal purging of the unit and is not a connection for heating a gaseous process medium.
Is the external fuse included in the scope of delivery?
No. The specification explicitly lists the 6 A slow-blow fuse as “external fusing required” — it must be provided on-site in the supply line and is not built into the heater.
Interested in the I²R heater?
Request the full datasheet or send us your enquiry directly — our engineering team will get back to you promptly.