Products
Components and systems for ultra-pure processes
From the proprietary I²R inline heater and modular chemical delivery to high-precision temperature sensors — developed and manufactured for the semiconductor industry.
01 — Point-of-use heating
I²R UHP Inline Heater
Compact hyper-dynamic chemical heater for the rapid, precise and contamination-free heating of ultra-pure process fluids — based on the proprietary 4Tex I²R heating technology.
Metal-free fluid contact. Thermal response within seconds.
02 — Metrology
FT / FX Temperature Sensors
PT100 temperature sensors made from high-purity fluoropolymer (PTFE/PFA) for Ultra Pure Water, high-purity chemicals and process gases — with patented dead-volume-free sealing.
Drift-free measurement of ultra-pure fluids to DIN EN 60751.
03 — Chemical delivery
bCDS — Chemical delivery system
The bCDS supplies process chemicals in a controlled, safe and contamination-free manner — with an integrated containment glovebox and continuous safety monitoring.
Individual configurations — engineered to your process requirements.
04 — Concentration metrology
SemiChem APM200 Titrator
Precise concentration measurement of process chemicals in semiconductor manufacturing. 4Tex is the European distributor of the SemiChem APM200 by Entegris.
Stable process chemistry through continuous concentration monitoring.
Technology competence
What our products are engineered for
Not sure which configuration fits?
Our engineering team helps with the design — from single component to integrated system.
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