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Services
Global service for wet-chemical semiconductor processes
Technical service and engineering support for wet-chemical semiconductor process equipment — from maintaining existing wet-process tools to fully customised system solutions, worldwide and directly on-site.
Global service & support
Global service for wet-chemical process equipment
4Tex supports semiconductor fabs worldwide with wet-chemical process equipment and systems — professional equipment service, technical support and production assistance directly on-site, including under cleanroom conditions.
Wet-chemical process equipment service
Maintenance, inspection and technical support of wet-process equipment — from wet benches to chemical delivery systems.
Installation & commissioning
Assembly and installation under cleanroom conditions — precise, clean and documented.
Optimisation & troubleshooting
Systematic troubleshooting, conversions and optimisation of wet-chemical processes and existing systems.
On-site production support
Experienced technicians support your production worldwide — including high-purity chemical and fluid processes.
Refurbishment
Refurbishment of SEZ Products
4TEX provides professional refurbishment services for SEZ Spin Etcher systems, including the SP101, SP201, SP102, SP203, SP304, SP223 and SP323. Our experienced semiconductor specialists refurbish components and equipment under controlled cleanroom conditions. All required assemblies can be professionally inspected, reconditioned and assembled in our cleanroom infrastructure.
Advanced engineering solutions
Customised technical solutions for the semiconductor industry
Where standard systems reach their limits, 4Tex develops tailored solutions for wet-chemical semiconductor processes — from the technical concept and process optimisation to the ready-to-run system solution.
Customer-specific developments
Technical concepts and systems engineered precisely to your process requirements.
Process optimisation
Analysis and further development of existing processes for higher stability and yield.
Development of special system solutions
From individual assemblies to integrated systems — engineering for semiconductor applications.
Customised solution example
mCDS-90-SL Touch — mobile chemical delivery system
Developed as a customised engineering solution for CMP process integration, the mCDS-90-SL Touch supplies CMP process tools with slurry chemicals in a controlled, safe manner — mobile, with integrated agitator, pump and touchscreen control.
Mobile 90-litre tank
Wheeled 90-litre tank with an integrated IKA agitator and fill-level indicator for slurry chemicals.
Variable-speed pump
Integrated pump with variable speed from 1,000 to 8,000 rpm for supplying CMP process tools.
Touchscreen control & host connectivity
Touchscreen operation with Main, Diagnosis and Settings views; cyclic transmission of temperature, fill level and system status to the host system.
Dual safety circuits
Independent safety circuits for emergency-stop and door-contact monitoring, plus multiple safety interlocks for safe operation.
Automatic fill-level protection
Low-level and alarm-level sensors automatically stop the pump and close the process valve outside the safe fill range.
Business areas
Three areas of competence, one standard
Equipment service
Service and support for semiconductor process equipment — from maintenance to upgrading existing systems.
UHP fluid products
Proprietary products for the contamination-free heating and handling of ultra-pure process fluids.
Engineering & R&D
Design, integration and further development — customer-specific and in close coordination with OEMs and fabs.
Service that keeps your fab running
Talk to our team about equipment service, on-site support or your individual engineering requirement.